
凝结核粒子技术器优化半导体设备中的悬浮纳米粒子检测
随着对产品良率的日益关注,特别是在采用先进技术节点的制程上,用户对于机台内部的纳米颗粒监控的需求日益提升鉴于此,PMS推出了可监测小至10纳米粒子的全新NanoAir™ 10 凝结核粒子计数器(CPC)以及首款专为处理纳米粒子传输而设计的—ParticleSeeker™多口气溶胶采样器。该产品将解锁新的
监测可能性,从而为行业当前存在的盲区和需求提供了可能的解决方案。
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随着对产品良率的日益关注,特别是在采用先进技术节点的制程上,用户对于机台内部的纳米颗粒监控的需求日益提升鉴于此,PMS推出了可监测小至10纳米粒子的全新NanoAir™ 10 凝结核粒子计数器(CPC)以及首款专为处理纳米粒子传输而设计的—ParticleSeeker™多口气溶胶采样器。该产品将解锁新的
监测可能性,从而为行业当前存在的盲区和需求提供了可能的解决方案。
该手册涵盖了从粒子计数技术到适用于制药行业的监管标准,以及满足这些标准所需的技术和解决方案等。
本文件将常见问题与NanoAir®和 ParticleSeeker®网络研讨会期间和之后所收集的问题,以下是产品专家针对这些问题的回答。
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